고효율 증발원을 이용한 나노박막 제작 및 특성

초록

High efficiency evaporation source is developed to perform a vacuum deposition process in which a deposition material is heated and vaporized to eject from a solid state to a gaseous state. In order to obtain a uniform thin film, conditions such as the structure of the effusion cell, the distance between the effusion cell and the substrate, nozzle size, and evaporation angle must be optimized. In this experiment, organic material Alq3 and metal Al thin film deposition process was performed using the effusion cell and thin film characteristics was analyzed.

키워드